Stand: 21.6.2021, 15:37
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Stand: 21.6.2021, 15:37
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Vol |
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No. |
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| R. Catrin | C. Gachot, G. Marchand, U. Schmid, F. Mücklich | „Selective Wet Chemical Etching of Metallic Thin Films Designed by Laser Interference Metallurgy (LIMET)“ | SPIE Proceedings | 7362 | 2009 | 736217-1-6 | Conference proceeding: SPIE Europe Microtechnologies for the New Millennium (Dresden, 4-6 Mai 09) | DOI:10.1117/12.821333 | PDF verfügbar | published |
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