Stand: 21.6.2021, 15:37
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K.M. Calamba | I.C. Schramm, M.P. Johansson Joesaar, J. Ghanbaja, J.F. Pierson, F. Mücklich, M. Odén | „Enhanced thermal stability and mechanical properties of nitrogen deficient titanium aluminum nitride (Ti0.54AI0.46Ny) thin films by tuning the applied negative bias voltage“ | Journal of Applied Physics | 122 | 2017 | 255 | published |
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