Stand: 21.6.2021, 15:37
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F. Soldera | G. Burdiles, U. Schmid, H. Seidel, F. Mücklich | „Investigation of the Interaction between Electrical Discharges and Low Resistivity Silicon Substrates“ | Applied Surface Science | 254 | 2008 | 7 | 2150-2157 | DOI: 10.1016/j.apsusc.2007.08.087 | PDF verfügbar | published |
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